TH-MLS203-1 – Fast XY Scanning Stage
TH-MLS203-1 – Fast XY Scanning Stage
Product Drawing
Key Specificationsa | |
---|---|
Travel Range | 110Â mm x 75Â mm (4.3″ x 2.95″) |
Velocity (Max) | 250Â mm/s |
Acceleration (Max) | 2000Â mm/s2 |
Bidirectional Repeatability | 0.25 µm |
Unidirectional Repeatability | 0.25 µm |
Horizontal Load Capacity (Max) | 1.0Â kg (2.2Â lb) |
Min Achievable Incremental Movement | 0.1 µm |
Home Location Accuracy | 0.25 µm |
Absolute On-Axis Accuracy | <3 µm |